====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     4.E+04 A   Layer # 1- Density = 11.29E22 atoms/cm3 = 2.253 g/cm3
  Layer # 1-  C = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   240.4E+02 A   Straggling =   192.4E+01 A
 Ion Lateral Range =   156.7E+01 A   Straggling =   196.7E+01 A
 Ion Radial  Range =   245.8E+01 A   Straggling =   126.2E+01 A
====================================================================
 Range Skewne- = -001.1587  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.9867  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe          C    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
350010.E-03  0.0000E+00  4.3737E+06
700010.E-03  0.0000E+00  4.9926E+06
105001.E-02  0.0000E+00  4.9611E+06
140001.E-02  0.0000E+00  5.2297E+06
175001.E-02  0.0000E+00  6.1651E+06
210001.E-02  0.0000E+00  5.8297E+06
245001.E-02  0.0000E+00  6.1789E+06
280001.E-02  0.0000E+00  5.9040E+06
315001.E-02  0.0000E+00  5.8894E+06
350001.E-02  0.0000E+00  6.0117E+06
385001.E-02  0.0000E+00  6.6394E+06
420001.E-02  0.0000E+00  6.7637E+06
455001.E-02  0.0000E+00  6.7940E+06
490001.E-02  0.0000E+00  6.8334E+06
525001.E-02  0.0000E+00  6.9114E+06
560001.E-02  0.0000E+00  7.2226E+06
595001.E-02  0.0000E+00  7.2214E+06
630001.E-02  0.0000E+00  6.8034E+06
665001.E-02  0.0000E+00  7.3743E+06
700001.E-02  0.0000E+00  7.5763E+06
735001.E-02  0.0000E+00  7.8217E+06
770001.E-02  0.0000E+00  7.6231E+06
805001.E-02  0.0000E+00  8.4589E+06
840001.E-02  0.0000E+00  8.1897E+06
875001.E-02  0.0000E+00  8.4629E+06
910001.E-02  0.0000E+00  8.1806E+06
945001.E-02  0.0000E+00  8.8803E+06
980001.E-02  0.0000E+00  8.9614E+06
101500.E-01  0.0000E+00  9.1443E+06
105000.E-01  0.0000E+00  9.9397E+06
108500.E-01  0.0000E+00  9.4123E+06
112000.E-01  0.0000E+00  9.3503E+06
115500.E-01  0.0000E+00  1.0089E+07
119000.E-01  0.0000E+00  1.1072E+07
122500.E-01  0.0000E+00  1.1453E+07
126000.E-01  0.0000E+00  1.1366E+07
129500.E-01  0.0000E+00  1.1656E+07
133000.E-01  0.0000E+00  1.1707E+07
136500.E-01  0.0000E+00  1.2444E+07
140000.E-01  0.0000E+00  1.2630E+07
143500.E-01  0.0000E+00  1.3016E+07
147000.E-01  0.0000E+00  1.2797E+07
150500.E-01  2.8571E+02  1.3696E+07
154000.E-01  0.0000E+00  1.4519E+07
157500.E-01  0.0000E+00  1.4685E+07
161000.E-01  0.0000E+00  1.5394E+07
164500.E-01  5.7143E+02  1.6015E+07
168000.E-01  5.7143E+02  1.6659E+07
171500.E-01  2.8571E+02  1.7651E+07
175000.E-01  1.1429E+03  1.7720E+07
178500.E-01  5.7143E+02  1.8814E+07
182000.E-01  2.8571E+02  1.9148E+07
185500.E-01  1.7143E+03  2.0804E+07
189000.E-01  1.7143E+03  2.1576E+07
192500.E-01  1.7143E+03  2.2740E+07
196000.E-01  2.2857E+03  2.2797E+07
199500.E-01  1.4286E+03  2.3433E+07
203000.E-01  1.7143E+03  2.6206E+07
206500.E-01  2.0000E+03  2.6465E+07
210000.E-01  3.4286E+03  2.8650E+07
213500.E-01  4.0000E+03  2.9334E+07
217000.E-01  5.7143E+03  3.1546E+07
220500.E-01  7.1429E+03  3.2041E+07
224000.E-01  9.7143E+03  3.3800E+07
227500.E-01  1.2571E+04  3.5704E+07
231000.E-01  1.5714E+04  3.5648E+07
234500.E-01  1.4571E+04  3.3322E+07
238000.E-01  1.8000E+04  3.2659E+07
241500.E-01  1.7429E+04  3.3909E+07
245000.E-01  2.7143E+04  3.2191E+07
248500.E-01  2.6857E+04  2.9518E+07
252000.E-01  2.1143E+04  2.4855E+07
255500.E-01  2.8000E+04  1.9541E+07
259000.E-01  1.9143E+04  1.4315E+07
262500.E-01  1.5714E+04  1.0641E+07
266000.E-01  1.0571E+04  5.9003E+06
269500.E-01  7.4286E+03  3.5880E+06
273000.E-01  2.0000E+03  1.3574E+06
276500.E-01  1.7143E+03  9.6914E+05
280000.E-01  1.4286E+03  2.1686E+05
283500.E-01  0.0000E+00  1.8857E+04
287000.E-01  0.0000E+00  2.2857E+04
290500.E-01  0.0000E+00  1.2571E+04
294000.E-01  0.0000E+00  0.0000E+00
297500.E-01  0.0000E+00  0.0000E+00
301000.E-01  0.0000E+00  0.0000E+00
304500.E-01  0.0000E+00  0.0000E+00
308000.E-01  0.0000E+00  0.0000E+00
311500.E-01  0.0000E+00  0.0000E+00
315000.E-01  0.0000E+00  0.0000E+00
318500.E-01  0.0000E+00  0.0000E+00
322000.E-01  0.0000E+00  0.0000E+00
325500.E-01  0.0000E+00  0.0000E+00
329000.E-01  0.0000E+00  0.0000E+00
332500.E-01  0.0000E+00  0.0000E+00
336000.E-01  0.0000E+00  0.0000E+00
339500.E-01  0.0000E+00  0.0000E+00
343000.E-01  0.0000E+00  0.0000E+00
346500.E-01  0.0000E+00  0.0000E+00
350000.E-01  0.0000E+00  0.0000E+00
